TMP-V 2304LM Max Main inlet pumping speed (ml/min) Max Ultimate pressure A63 1.0x10−7Pa

TMP-B300 Max Main inlet pumping speed (l/s) Max Main inlet pumping speed (ml/min) Nitrogen (280 l/s), Hydrogen (220 l/s), Helium (270 l/s) Argon (2200 ml/min) A30 Max Ultimate pressure page1image31154720 Max Ultimate pressure 1.0x10−8 Pa

3304LM/TMP-X 2905,3405 Max Main inlet pumping speed (ml/min) Max Main inlet pumping speed (l/s) A59 1500 (TMP-V), 800 (TMP-X) Nitrogen (1080 l/s), Hydrogen (800 l/s), Helium (1040 l/s) Max Ultimate pressure 1.0x10−7Pa

TMP (M/LMC/MC/LM) 203 - 1003 Max Main inlet pumping speed (l/s) Nitrogen (1080 l/s), Hydrogen (790 l/s), Helium (930 l/s) A92 Max Ultimate pressure 1.0x10−9 Pa

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